Fire Safety Design in Semiconductor 制造业 Cleanrooms

保罗Bigatti

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2023年12月11日

As the demand for semiconductor manufacturing skyrockets, 对前沿技术的需求也是如此, code-compliant fire safety measures that set new benchmarks for innovation and reliability. This is especially true for the cleanroom environments in semiconductor fabrication areas. Due to the use of combustible materials and flammable chemicals, as well as the presence of high voltage electrical power, any kind of fire in a cleanroom can quickly become catastrophic.

消防一体化的挑战

One of the pivotal challenges in semiconductor facility construction is the intricate process of tool hook-up in the cleanroom. The connections between manufacturing tools and facility infrastructure require meticulous ad在皇家88账户注册里nce to standards, 特别是在SEMI S2中概述的那些, 环境, 健康 & Safety Guideline for Semiconductor 制造业 Equipment, which governs hook-up operations. While the risks associated with process equipment are evaluated in accordance with SEMI S2, obtaining and maintaining the Highly Protected Risk (HPR) qualifications of the cleanroom areas and manufacturing facility adds an extra layer of complexity to these operations.

The cleanroom environments within semiconductor facilities demand exceptionally high levels of precision and cleanliness, making the integration of traditional fire safety measures complex. 结果是, standard fire detection systems may not be suitable for the early detection of certain types of fires or chemical reactions specific to semiconductor production.

The unique chemical processes and materials involved in semiconductor manufacturing also introduce additional complexities. Some of the semiconductor processing involves materials that cannot be protected by water-based suppression systems. 正因为如此, experts with relevant experience in fire suppression agents and systems for hazardous areas that store and process water-reactive materials should be employed to develop a fire safety strategy.

半导体设备的安全设计

在半导体设施中, fire engineers are often responsible for designing and implementing fire alarm, 消防, 烟疏散, 防火分区和联锁系统. At the heart of this solution lies the groundbreaking Design for Safety (DFS) approach, a paradigm shift aimed at achieving a zero-accident rate in personal safety. DFS的主要组成部分包括:

  • 评估损失历史. 从过去学习是至关重要的. This approach involves a thorough evaluation of both local and international loss histories, providing a foundation for understanding potential risks.
  • 设备图纸和文件审核. A meticulous examination of facility drawings and documentation ensures that every aspect aligns with the highest safety standards, 没有任何疏忽的余地.
  • 国际制造设备比较. Drawing inspiration from global best practices involves comparing designs with international fabrication facilities, incorporating the latest advancements in safety protocols.
  • 半定量风险矩阵. Utilizing a semi-quantitative risk matrix identifies and ranks potential risks, allowing for efficient resource allocation and prioritization of safety enhancements.
  • 新创新和智能技术. Embracing innovation at the core of DFS involves integrating cutting-edge technologies to enhance safety measures, ensuring designs are not just compliant but forward-thinking.
  • 网站访问. Thorough site visits by a multi-disciplinary engineering team ensure that theoretical designs seamlessly translate into practical safety implementations. 对客户的好处包括安全作为基石.

超越遵守你的消防安全策略

Jensen Hughes’ commitment to DFS doesn't just stop at compliance. Our fire engineering consultants draw on their expertise and experience with fire safety systems, suppression agents and hazardous materials storage to design cost-effective, performance-based protection systems that not only meet code requirements but also uphold the highest standards of life safety. Our team routinely handles challenging designs encompassing life safety, 任务的连续性, 产权保护, 文物保护和环境保护. 了解更多关于皇家88娱乐团队的信息 在皇家88账户注册里.

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作者简介

保罗Bigatti
Paolo is a Senior Fire Consultant with 12 years of experience. Paolo is specialized in 消防 systems design, review and specification.